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Manufacturer/company:

Company Name

Brooks CCS GmbH

Im Wiesengrund 17
Radolfzell
Germany

Number of projects
1
Number of test pieces
1
Phone

-

Email

-

Website

http://www.brooks.com/

Documents

BR 2504-1613_statement_01.pdf
Valid until 18.04.2030
Download
BR 2504-1613_certificate_01.pdf
Valid until 18.04.2030
Download

Test piece

Name of test piece/s EUV GUARDIAN LEAP HANDLING UNIT X/Y/R
Project number BR 2504-1613
Created on 06/24/2025
Valid until 04/18/2030
Test type Particle emission (ISO 14644-1, -14)
Classfication Suitability for air cleanliness class: (ISO-Class):5

Tests & results

Particle emission (ISO 14644-1, -14)

Particle emission (ISO 14644-1, -14)

Test parameter(s)

Air Cleanliness Class

X-Axis

5

Y-Axis

4
All-Axes:
vx,1 = 1.0 m/s; ax,1 = 1.0 m/s2; vy,1 = 0.5 m/s;  
ay,1 = 1.0 m/s2; wr,1 = 180°/s; w’r,1 = 180°/s2

5
All-Axes:
vx,2 = 0.6 m/s; ax,2 = 0.6 m/s2; vy,3 = 0.3 m/s;
ay,3 = 0.3 m/s2; wr,2 = 90°/s; w’r,2 = 90°/s2
 5

Overall result

5

Please note: Transport damages, incorrect installation, aging behavior, etc. can influence the test result.