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Cleanroom Facilities
Automation Components
Working Place and Operator
Materials
Process Equipment
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Energy Supply
Digital Testing
Dry-Cleanroom
Type of test
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Cleaning performance - particles (VDI 2083 Part 17)
Chemical resistance (immersion procedure)
Particle emission mop/wipes
Particle Emission (VDI 2083 Part 17)
Outgassing Behavior (VDI 2083 Part 17)
Biological Cleanability (VDI 2083 Part 17)
Cleanability (VDI 2083 part 17)
Expertise
Outgassing Behavior (Ammoniac (NH3))
Outgassing Behavior (inorganic acids (Acid))
Outgassing Behavior (VOC/SVOC))
Air flow velocity
Air flow visualisation
Air permeability
Biological Contamination (airborne)
Biological Contamination (surface)
Computational Fluid Dynamics (CFD)
Contamination residues
Gravimetric analysis
EDX analysis
Feasibility study
Thin film contamination
Filtration efficiency
Isolation factor
Leakage testing
Particle per wafer and pass (PWP)
Particles (airborne)
Particles (diluted)
Particles (sedimented)
Pressure conditions
Pressure tightness
Raman analysis
Relative humidity
Resistance to corrosion (NaCl)
Surface roughness
Training
CSM Outgassing Behavior VOC/SVOC
CSM Outgassing Behavior Ammonia (NH3)
Chemical resistance (immersion)
CSM Chemical Resistance (details)
CSM Biological Resistance
CSM Antibacterial Activity
CSM Particle Emission
CSM Particle Emission (details)
Riboflavin test Equimpent (cleanability), (VDMA leaflet “Riboflavin test for low-germ or sterile process technologies - Fluorescence test for testing cleanability”)
Airborne Siloxanes (ISO 16017-1)
PWIS – paint wetting impairment substances (PV 3.10.7)
Antibacterial Activity (ISO 22196)
Hydrogen peroxide absorption/desorption (H2O2)
Extractable organic matter (IEST-RP-CC005.3)
Biological Resistance (ISO 846)
Electrical Resistance (point-to-point resistance (Rp-p)), (DIN EN 61340-4-1, -5-1)
Absorption behavior (DIN EN ISO 9073-6)
Wear behavior
ESD behavior (SEMI E78)
Acustic power (ISO 3741)
Particle Emission (ISO 14644-14)
Electrical Resistance (resistance to earth (Rgp)), (DIN EN 61340-2-3, -5-1)
Electrical Resistance (chairs), (IEC 61340-2-3, IEC 61340-5-1)
Particle Emission in Dry-Cleanroom
Riboflavin test Materials (VDMA leaflet “Riboflavin test for low-germ or sterile process technologies - Fluorescence test for testing cleanability”)
Riboflavin test Equipments (VDMA leaflet “Riboflavin test for low-germ or sterile process technologies - Fluorescence test for testing cleanability”)
Hygienic Design (EU GMP Annex 1; EHEDG Doc. 8; DIN EN 1672-2; ISO 14159)
Particle Emission (ISO 14644-1)
Particle emission (ISO 14644-1, -14)
Chemical Resistance (VDI 2083 Part 17; ISO 2812-4 (spot/stain method); ISO 4628-1)
CSM Chemical resistance (ISO 4628-1; ISO 2812-4 (spot/stain method); VDI 2083 Part 17)
CSM Outgassing Behavior inorganic acids (Acid)
Cleanroom acceptance (ISO 14644-1:2015)
In-place Cleanability (based on EHEDG Doc. 2)
Particle Emission in Vacuum
Riboflavin continuous text (VDMA information sheet »Riboflavin test for low-germ or sterile process technologies – Fluorescence test for examination of cleanability«. The norms stated generally refer to the version valid at the time of the tests
Particle Emission in Dry-Cleanroom with Pre-aging (ISO 14644-1, -14)
Electrostatic behavior Dry-Cleanroom
Electrical resistance (resistance to earth (Rgp), point-to-point resistance (Rp-p)), (DIN EN 61340-2-3, -4-1, 5-1)
Electrical resistance (resistance to earth (Rgp), point-to-point resistance (Rp-p)), (ANSI STM4.1:2017; ANSI S20.20-2014)
CSM Riboflavin test Materials (VDMA leaflet “Riboflavin test for low-germ or sterile process technologies - Fluorescence test for testing cleanability”)
Hydrogen Peroxide Absorption/Desorption (H2O2), (VDI 2083 Part 20)
Test category
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Lighting Systems
ESD-controlled
Filtration Systems
Air Conditioning Systems
Door
Wall / Ceiling / Floor / Door
Linear Units
Positioning Systems
Robotics
Transfer and Bearing
Transfer Systems and Bearing
Equipment Parts
Work Equipment
Garments
Storage
Chairs
Coatings
Ceramics
Plastics
Liquids
Metals
Packing Materials
Lubricants / Sealants / Adhesivs
Consumables
Material Composites
Heating and Cooling
Measuring Equipment
Pneumatic Components
Sorting and Packaging
Vacuum Components
Wafer Equipment
Work Benches
Personnel Training
Process Evaluation
Cleanroom Acceptance
Cable Guiding System
Cable Systems
not assigned
Battery
Cables
PCB Manufacturing
Certificate number
Classification
good
very good
bad
very bad
Suitability for air cleanliness class: 1
Suitability for air cleanliness class: (ISO-Class): 1
Suitability for air cleanliness class: (ISO-Class): 2
Suitability for air cleanliness class: (ISO-Class): 3
Suitability for air cleanliness class: (ISO-Class): 4
Suitability for air cleanliness class: (ISO-Class): 5
Suitability for air cleanliness class: (ISO-Class): 6
Suitability for air cleanliness class: (ISO-Class): 7
Suitability for air cleanliness class: (ISO-Class): 8
Suitability for air cleanliness class: (ISO-Class): 9
Particulate vacuum suitability: Particle count with consideration of size distribution
Compliance with limit value (DIN EN 61340-5-1): fulfilled
Compliance with limit value (DIN EN 61340-5-1): not fulfilled
none
really weak
weak
good
very good
excellent
very good
weak
none
really weak
weak
good
very good
excellent
ISO-ACCe/m-Class (x) at 23°C 0 - 4
ISO-ACCe/m-Class (x) at 23°C 0 - 8
ISO-ACCe/m-Class (x) at 23°C 8- 12
≤ 5 min: Non-absorptive
> 5 - ≤ 15 min: fast
> 15 - ≤ 60 min: medium
> 60 min: slow
Nicht bestimmbar: catalytic activity
geeignet bis GMP-Klasse: A
geeignet bis GMP-Klasse: B
geeignet bis GMP-Klasse: C
geeignet bis GMP-Klasse: D
Non-absorptive catalytic activity
fast catalytic activity
medium catalytic activity
slow catalytic activity
Suitability for air cleanliness class: (ISO-Class): 1
Suitability for air cleanliness class: (ISO-Class): 2
weak
good
insufficient
ISO-ACCe/m-Class (x) at 23°C < -9,6
ISO-ACCe/m-Class (x) at 23°C -1 bis -1,9
ISO-ACCe/m-Class (x) at 23°C -2 bis -2,9
ISO-ACCe/m-Class (x) at 23°C -3 bis -3,9
ISO-ACCe/m-Class (x) at 23°C -4 bis -4,9
ISO-ACCe/m-Class (x) at 23°C -5 bis -5,9
ISO-ACCe/m-Class (x) at 23°C -6 bis -6,9
ISO-ACCe/m-Class (x) at 23°C -7 bis -7,9
ISO-ACCe/m-Class (x) at 23°C -8 bis -8,9
ISO-ACCe/m-Class (x) at 23°C -9 bis -9,9
ISO-ACCe/m-Class (x) at 23°C -10 bis -10,9
ISO-ACCe/m-Class (x) at 23°C -11 bis -11,9
ISO-ACCe/m-Class (x) at 23°C -12
ISO-ACCe/m-Class (x) at 23°C 0 bis -0,9
ISO-ACCe/m-Class (x) at 23°C -1 bis -1,9
ISO-ACCe/m-Class (x) at 23°C -2 bis -2,9
ISO-ACCe/m-Class (x) at 23°C -3 bis -3,9
ISO-ACCe/m-Class (x) at 23°C -4 bis -4,9
ISO-ACCe/m-Class (x) at 23°C -5 bis -5,9
ISO-ACCe/m-Class (x) at 23°C -6 bis -6,9
ISO-ACCe/m-Class (x) at 23°C -7 bis -7,9
ISO-ACCe/m-Class (x) at 23°C -8 bis -8,9
ISO-ACCe/m-Class (x) at 23°C -9 bis -9,9
ISO-ACCe/m-Class (x) at 23°C -10 bis -10,9
ISO-ACCe/m-Class (x) at 23°C -11 bis -11,9
ISO-ACCe/m-Class (x) at 23°C -12
ISO-ACCe/m-Class (x) at 23°C 0 bis -0,9
ISO-ACCe/m-Class (x) at 23°C -1 bis -1,9
ISO-ACCe/m-Class (x) at 23°C -2 bis -2,9
ISO-ACCe/m-Class (x) at 23°C -3 bis -3,9
ISO-ACCe/m-Class (x) at 23°C -4 bis -4,9
ISO-ACCe/m-Class (x) at 23°C -5 bis -5,9
ISO-ACCe/m-Class (x) at 23°C -6 bis -6,9
ISO-ACCe/m-Class (x) at 23°C -7 bis -7,9
ISO-ACCe/m-Class (x) at 23°C -8 bis -8,9
ISO-ACCe/m-Class (x) at 23°C -9 bis -9,9
ISO-ACCe/m-Class (x) at 23°C -10 bis -10,9
ISO-ACCe/m-Class (x) at 23°C -11 bis -11,9
ISO-ACCe/m-Class (x) at 23°C -12
ISO-ACCe/m-Class (x) at 23°C 0 bis -0,9
ISO-ACCe/m-Class (x) at 23°C -1 bis -1,9
ISO-ACCe/m-Class (x) at 23°C -2 bis -2,9
ISO-ACCe/m-Class (x) at 23°C -3 bis -3,9
ISO-ACCe/m-Class (x) at 23°C -5 bis -5,9
ISO-ACCe/m-Class (x) at 23°C -4 bis -4,9
ISO-ACCe/m-Class (x) at 23°C -6 bis -6,9
ISO-ACCe/m-Class (x) at 23°C -7 bis -7,9
ISO-ACCe/m-Class (x) at 23°C -8 bis -8,9
ISO-ACCe/m-Class (x) at 23°C -9 bis -9,9
ISO-ACCe/m-Class (x) at 23°C -10 bis -10,9
ISO-ACCe/m-Class (x) at 23°C -11 bis -11,9
ISO-ACCe/m-Class (x) at 23°C -12
ISO-ACCe/m-Class (x) at 23°C 0 bis -0,9
ISO-ACCe/m-Class (x) at 23°C -1 bis -1,9
ISO-ACCe/m-Class (x) at 23°C -2 bis -2,9
ISO-ACCe/m-Class (x) at 23°C -3 bis -3,9
ISO-ACCe/m-Class (x) at 23°C -4 bis -4,9
ISO-ACCe/m-Class (x) at 23°C -5 bis -5,9
ISO-ACCe/m-Class (x) at 23°C -6 bis -6,9
ISO-ACCe/m-Class (x) at 23°C -7 bis -7,9
ISO-ACCe/m-Class (x) at 23°C -8 bis -8,9
ISO-ACCe/m-Class (x) at 23°C -9 bis -9,9
ISO-ACCe/m-Class (x) at 23°C -10 bis -10,9
ISO-ACCe/m-Class (x) at 23°C -11 bis -11,9
ISO-ACCe/m-Class (x) at 23°C -12
ISO-ACCe/m-Class (x) at 23°C 0 bis -0,9
ISO-ACCe/m-Class (x) at 23°C -1 bis -1,9
ISO-ACCe/m-Class (x) at 23°C -2 bis -2,9
ISO-ACCe/m-Class (x) at 23°C -3 bis -3,9
ISO-ACCe/m-Class (x) at 23°C -4 bis -4,9
ISO-ACCe/m-Class (x) at 23°C -5 bis -5,9
ISO-ACCe/m-Class (x) at 23°C -7 bis -7,9
ISO-ACCe/m-Class (x) at 23°C -6 bis -6,9
ISO-ACCe/m-Class (x) at 23°C -8 bis -8,9
ISO-ACCe/m-Class (x) at 23°C -9 bis -9,9
ISO-ACCe/m-Class (x) at 23°C -10 bis -10,9
ISO-ACCe/m-Class (x) at 23°C -11 bis -11,9
ISO-ACCe/m-Class (x) at 23°C -12
very good
good
weak
really weak
none
excellent
very good
good
weak
really weak
none
excellent
very good
good
weak
really weak
none
excellent
very good
good
weak
really weak
none
excellent
good
weak
none
excellent
good
weak
none
excellent
very good
good
weak
really weak
none
excellent
very good
good
weak
really weak
none
Suitability for air cleanliness class: (ISO-Class): 3
Suitability for air cleanliness class: (ISO-Class): 4
Suitability for air cleanliness class: (ISO-Class): 5
Suitability for air cleanliness class: (ISO-Class): 7
Suitability for air cleanliness class: (ISO-Class): 8
Suitability for air cleanliness class: (ISO-Class): 9
Suitability for air cleanliness class: (ISO-Class): 6
geeignet bis GMP-Klasse: A/B
geeignet bis GMP-Klasse: B/C
geeignet bis GMP-Klasse: C/D
Grenzwert: fulfilled
Grenzwert: not fulfilled
Grenzwert: fulfilled
Grenzwert: not fulfilled
Grenzwert: fulfilled
Grenzwert: not fulfilled
Grenzwert: fulfilled
Grenzwert: not fulfilled
excellent
Suitability for air cleanliness class: (ISO-Class): 1
Suitability for air cleanliness class: (ISO-Class): 2
Suitability for air cleanliness class: (ISO-Class): 3
Suitability for air cleanliness class: (ISO-Class): 4
Suitability for air cleanliness class: (ISO-Class): 5
Suitability for air cleanliness class: (ISO-Class): 6
Suitability for air cleanliness class: (ISO-Class): 7
Suitability for air cleanliness class: (ISO-Class): 8
Suitability for air cleanliness class: (ISO-Class): 9
excellent
siehe Fließtext / see continuous text
ISO-ACCe/m-Class (x) at 23°C < -8,5
ISO-ACCe/m-Class (x) at 23°C < -9,6
ISO-ACCe/m-Class (x) at 23°C 0 bis -0,9
ISO-ACCe/m-Class (x) at 23°C < -8,5
ISO-ACCe/m-Class (x) at 23°C < -8,5
ISO-ACCe/m-Class (x) at 23°C < -8,5
ISO-ACCe/m-Class (x) at 23°C < -9,6
ISO-ACCe/m-Class (x) at 23°C < -12,6
ISO-ACCe/m-Class (x) at 23°C < -12,6
ISO-ACCe/m-Class (x) at 23°C < -11,5
ISO-ACCe/m-Class (x) at 23°C < -11,5
ISO-ACCe/m-Class (x) at 23°C < -11,5
ISO-ACCe/m-Class (x) at 23°C < -11,5
Suitability for air cleanliness class: (ISO-Class): 1
Suitability for air cleanliness class: (ISO-Class): 2
Suitability for air cleanliness class: (ISO-Class): 3
Suitability for air cleanliness class: (ISO-Class): 4
Suitability for air cleanliness class: (ISO-Class): 5
Suitability for air cleanliness class: (ISO-Class): 6
Suitability for air cleanliness class: (ISO-Class): 7
Suitability for air cleanliness class: (ISO-Class): 8
Suitability for air cleanliness class: (ISO-Class): 9
excellent
very good
good
weak
really weak
none
Grenzwert: fulfilled
Grenzwert: not fulfilled
Grenzwert: fulfilled
Grenzwert: not fulfilled
Grenzwert: fulfilled
Grenzwert: not fulfilled
Suitability for air cleanliness class: 2
Suitability for air cleanliness class: 3
Suitability for air cleanliness class: 4
Suitability for air cleanliness class: 5
Suitability for air cleanliness class: 6
Suitability for air cleanliness class: 7
Suitability for air cleanliness class: 8
Suitability for air cleanliness class: 9
really weak
≤ 5 min: Non-absorptive
> 5 - ≤ 15 min: fast
> 15 - ≤ 60 min: medium
> 60 min: slow
Nicht bestimmbar: catalytic activity
excellent
very good
good
weak
really weak
none
Classifications grouped
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